Gold evaporation coating on silicon - thermal treatment
for adhesion
2008-05-10
MosheGold evaporation coating on silicon -
thermal treatment for adhesion
Suraj Patil
Hi Moshe, I dont know how much it would help you, but if I understand it right, you should be looking into the binary system of Au-Si. You should have the temperature close to or lower than eutectic point of the Au-Si system.So that underneath Si layer (few nanometers) diffuses into Au. I would suggest N2 environment should be fine for this. Shortest time to start trying would be 10 minutes. Hope this helps. Regards, Suraj Patil