Teflon Patterning
2008-04-21
Teimour Maleki2008-04-21
Michael LarssonSolvent effects on Teflon AF
Brubaker Chad
Teimour, Teflon AF should not actually be soluble in IPA. However, depending on method of use, it may cause mechanical removal (peelng). Best Regards, Chad Brubaker EV Group invent * innovate * implement Senior Process Technology Engineer - Direct: +1 (480) 305 2414, Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401 Cell: +1 (602) 321 6071 E-Mail: C.Brubaker@EVGroup.com, Web: www.EVGroup.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Teimour Maleki Sent: Friday, May 09, 2008 8:07 AM To: 'General MEMS discussion' Subject: [mems-talk] Solvent effects on Teflon AF Dear all, Does anybody know what is the effect of IPA on Teflon AF coated substrate? When I used IPA, it will remove the Teflon.