wafer bonding warpage
2009-06-27
杜 彦召wafer bonding warpage
杜 彦召
Hi all: i am bonding one glass wafer and one silicon wafer with epoxy and their TEC is the same. But why does it have near 500um warpage after bonding? Thank you! Andrew Du
Hi all: i am bonding one glass wafer and one silicon wafer with epoxy and their TEC is the same. But why does it have near 500um warpage after bonding? Thank you! Andrew Du