[MEMS-Business] New etcher from Etched In Time, Inc
Bob Henderson
bob.henderson at etchedintimeinc.com
Thu Dec 13 12:02:04 EST 2007
Etched In Time, Inc a manufacturer of a variety of semiconductor equipment
has just developed a low cost plasma etch system for R&D and pilot line
production MEMS related activities. The new system includes a robot loadlock
for hazardous applications like chlorine etches of various metals and custom
chambers for processing pieces as well as substrates from 2" thru 8" wafers.
System is listed under new products at www.etchedintimeinc.com and comes
with process guidelines for various etches.
More information about the MEMS-business
mailing list