[MEMS-Business] Anodic bonding Silicon-Glass

[Shalchian madjid]

Hi everybody 

I have three questions: 

1- Is it possible to perform anodic bonding of Silicon to Glass wafer after Aluminum deposition?  

2- Should I remove the oxide grown on Si (on bonding surface) before anodic bonding operation? 

3-  Can I use thermally grown wet oxide as Wet etching mask to perform deep etching of Si from 500um to less than 50um using KOH?

 
Best Regards,
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M-Sh