[mems-modsim] Etching?

[Ganesh Iyer]

Dear MEMS team..
 
Is there any way of making two V grooves (one smaller and one bigger) touching each other? smaller one has dimension of 75 microns width and larger has dimension of 225 microns wide.. I mean there has to be no gap between the two V groove and smaller V groove opens up to a larger V groove like a channel..  I am trying the wet etching using some techniques like giving a small gap between the two V grooves and etch it in KOH. but not working.. is there any other techniques anyone can suggest me or any suggestions in wet etching by which i can get the desired results?
 
thanks
ganesh


Ganesh R. Iyer
(H)    607 729 9499
(Lab) 607 777 4969
 


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