[mems-modsim] Comb drive simulation in FEMLAB

Raj rajduc at yahoo.com
Tue Apr 27 16:13:22 EDT 2004


Hi Isabelle,

At the risk of seeming a bit self-promotional, this
following paper of mine should be helpful to you. 
Check also its references, and there will be plenty to
give you both physical background of what is happening
and also simple benchmarks to test if your results are
correct.

http://www.mindspring.com/~gupta/_pdf/JMEMS0436JournalVersion.pdf

I would be happy to try to answer other questions you
have.  Unfortunately, I have not used FEMLAB, but to
get self-consistent simulations, i.e. ones in which
the device is both in electrostatic and in
elastomechanical equilibrium, either you will need to
write one big equation to cover both the electrostatic
and mechanics simultaneously, or you will need to pass
intermediate solutions between the different solvers
until they are mutually happy, i.e. consistent.  The
latter approach in literature is referred to
"relaxation" whereas the former is a "direct"
approach.

Regards,
Raj

--- Isabelle PF Harouche <isabelle at EE.UManitoba.CA>
wrote:
> 	Hello All,
> 
> 	I am a new user of the [mems-modsim] mailing list. 
> I am presently 
> developing simulations for shaped comb drives using
> FEMLAB.  My present 
> challenge is to combine the electrostatic domain
> with the plane stress 
> domain and create a multiphysics model.
> 
> 	Is anyone familiar with this type of modeling? I
> would appreciate 
> exchanging some ideas on the physics of this problem
> as well as the 
> software usage.  Is anyone familiar with FEMLAB?
> 
> 	Thanks in advance.
> 
> Ciao!
> 
> 	- Isabelle



	
		
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