[mems-modsim] modeling displacement field of circular plates

ttidwel ttidwel at uark.edu
Fri Jun 11 12:41:36 EDT 2004


Hello All,
I have created an analytical model for free standing (flexure supported) thin 
silicon plates subject to arbitrary electrostatic loading.  I would like to 
compare results with other folks (analytical or FEA or experimental).  If 
interested, fire back.





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