[mems-modsim] Modelling of Piezoresistive pressure sensors

[jose coello]

Greetings,

This is my first post here so I hope to make it right!

I have to develop an equivalent circuit model for a new piezoresistive
pressure sensor in the typical wheatstone bridge configuration.

I only need to model the electrical behaviour. In other words, I am not
interested in finding the electrical equivalence of the mechanical behaviour
of the device. The basic idea is to find parasitic capacitances and/or
inductances corresponding to material junctions and add them to the basic
wheatstone bridge.

If anyone can give me some hints or maybe suggest some papers, books or the
like, I would greatly appreciate it.


Thanks,
Josef
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