[mems-modsim] Re: Modelling of Piezoresistive pressure sensors

[khukerwin at charteredsemi.com]

Hi,

If you're not interested in the mechanical behavior then it's not really a
MEMS model problem isn't it?

If you just need the electrical parasitics, you can construct a pretty good
model just by studying the structure of your device. I would suggest that
you take a look at an RF subcircuit model for a MOSFET to get a feel for
where the parasitics are supposed to go. The book I have (Device Modeling
for Analog and RF CMOS Circuit Design by Ytterdal, Cheng, and Fjeldly) has
a nice illustration, but I'm sure you can find it in many other places.

HTH,
Kerwin



Message: 1
Date: Tue, 6 Jun 2006 16:07:52 +0200
From: "jose coello" <florentmems at googlemail.com>
Subject: [mems-modsim] Modelling of Piezoresistive pressure sensors
To: mems-modsim at memsnet.org
Message-ID:
             <9abe76e30606060707t190cf17ex8498ba23e6a9e0e0 at mail.gmail.com>
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Greetings,

This is my first post here so I hope to make it right!

I have to develop an equivalent circuit model for a new piezoresistive
pressure sensor in the typical wheatstone bridge configuration.

I only need to model the electrical behaviour. In other words, I am not
interested in finding the electrical equivalence of the mechanical
behaviour
of the device. The basic idea is to find parasitic capacitances and/or
inductances corresponding to material junctions and add them to the basic
wheatstone bridge.

If anyone can give me some hints or maybe suggest some papers, books or the
like, I would greatly appreciate it.


Thanks,
Josef
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