[mems-modsim] Gyro Simulation

[Evgenii Rudnyi]

> Basically i am a Mechanical Engineer and working on
> Capacitative Microgyro. i need to draw its equvalent
> circut diagram. Is there any paper who can help me out
> in this regards. i am confused that how we draw an
> equivalent circut diagram for a device which have
> multiple degree of freedom.

Start with some discretization methods, for example, the finite element  
method. After it, you have a system of ordinary differential equations  
(ODEs. By comparing this system with ODEs for a circuit, you can see  
that mathematically they are similar. This way you can obtain an  
equivalent circuit model.

Some problem is the dimension of a finite element model. It can be  
quite high. Solution - use model reduction:

http://www.imtek.uni-freiburg.de/simulation/mor4ansys/

For an example on how it is working for a microgyroscope, look at

http://www.imtek.uni-freiburg.de/simulation/mor4ansys/pdf/ 
lienemann04MSM.pdf

Well, I should say that how to deal with capacitive effects is an open  
question as this make the problem nonlinear. The example above is for  
pure structural problem. Some approach is the linearization around an  
operation point, see an example for an RF resonator:

http://www.imtek.uni-freiburg.de/simulation/mor4ansys/pdf/ 
deltin06eurosime.pdf
http://www.imtek.uni-freiburg.de/simulation/mor4ansys/pdf/ 
deltin06scee.pdf

Best wishes,

Evgenii

P.S. We have a list for model reduction benchmarks

http://elmo.imtek.uni-freiburg.de/mailman/listinfo/benchmark

and there is a mor4ansys list as well

http://groups.google.com/group/mor4ansys/

You are welcome to subscribe.