[mems-modsim] where to place piezoresistors?

[faraz khatami]

A rectangular plate, piezoresistive pressure sensor is to be desigened. so after doing the FEA in ANSYS the stress countor is achieved. it's known that the maximum von misses stress is in the relative edge of the plate and substrate. so this is the question, should the resistors pass this reigon or not? because finding the average stress around the resistors position, we will count some points (in the edge of the plate) with stress amounts much larger than the other regions and this will mix up the average stress amount. 
       
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