[mems-modsim] linearity in piezoresistive pressure sensor

faraz khatami farkmic at yahoo.com
Tue Jul 3 08:05:52 EDT 2007


hello,
   
  A piezoresistive pressure sensor is to be designed. I have two questions:
  first, does linearity mean, not to enter the plastic region or what? second, where can I find the linearity relations with exerted pressure for a rectangular plate used in the pressure sensor?
   
  Thanks
   

 
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