[mems-modsim] linearity in piezoresistive pressure sensor

[Raj Gupta]

Faraz-

I believe you asked a similar question a few days back.  There is limited
literature on second-order effects in piezoresistive silicon and MEMS sensor
parasitics.  I suggest you seek out Kanda's papers (as reference only) and then
do you own analysis.

Silicon exhibits very little plasticity.  It is brittle and will shatter rather
than fatigue.

Raj Gupta
http://terahz.org

--- faraz khatami <farkmic at yahoo.com> wrote:

> hello,
>    
>   A piezoresistive pressure sensor is to be designed. I have two questions:
>   first, does linearity mean, not to enter the plastic region or what?
> second, where can I find the linearity relations with exerted pressure for a
> rectangular plate used in the pressure sensor?
>    
>   Thanks