[mems-modsim] silicon wafer

[faraz khatami]

Dear All,
   
  I'm theoritically designing a MEM sensor and I have not enough 
experience about fabrication and I have a problem about it. 
   
  I have a <100> silicon wafer to be fabricated. How can I find out whether
mechanical charactristics of the silicon is the same in the (x,y,z) 
directions or not? 
   
  because in some papers I've seen that the silicon has 100 mechanical 
properties in z direction and it has 110 mechanical properties in x,y 
directions. Is this related to silicon wafer fabrication method or 
what? please introduce some papers about that if possible.
   
  Thanks a lot
faraz  

       
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