[mems-modsim] modal analysis of tensile prestressed ultra-thin membrane

Steffen Michael steffen.michael at melexis.com
Thu Jun 21 07:14:16 EDT 2007


Dear all,
I did a nonlinear prestressed modal analysis for a 100nm thick round 
membrane (diameter some mm) with the element shell181. I did 
measurements to compare the simulation results with the reality - there 
is a larger  deviation.  In contrast to the ultra-thin membrane  there 
is a good concordance between simulation and measurements results for  
thin  membranes.
Does anybody know anything about limitations in modelling membranes with 
an extreme aspect ratio. Are there additional things to consider?
Thanks in advance.
Best regards,
Steffen


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