[mems-modsim] modal analysis of tensile prestressed ultra-thin
membrane
Steffen Michael
steffen.michael at melexis.com
Thu Jun 21 07:14:16 EDT 2007
Dear all,
I did a nonlinear prestressed modal analysis for a 100nm thick round
membrane (diameter some mm) with the element shell181. I did
measurements to compare the simulation results with the reality - there
is a larger deviation. In contrast to the ultra-thin membrane there
is a good concordance between simulation and measurements results for
thin membranes.
Does anybody know anything about limitations in modelling membranes with
an extreme aspect ratio. Are there additional things to consider?
Thanks in advance.
Best regards,
Steffen
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