[mems-talk] Aluminium Nitride deposition

[Sushant.Salgar@asu.edu]

Hi,
I'm a student at ASU.We are doing a Aluminium nitride deposition on Al
electrode.I would like to know the deposition conditions required for the
deposition of AlN on Al electrode ( Sputter deposition of AL in the presence
of nitrogen and Ar to get AlN flim),such that the thin film of AlN is
piezoelectric.
Any help regarding the piezoelectric properties of AlN films and their
deposition techniques would be most invaluable to us.
I would be extremely grateful if anybody could help.
Thank you
bye
Sushant