[mems-talk] Adhesion promotors for TiN

Knut Lian knut.lian at sensonor.no
Tue Jul 1 09:08:18 EDT 2003

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Dear MEMS collegues,

Does anybody know a suitable adhesion promotor for improving the adhesion of Shipley 1800 series resist on TiN?

Best regards

Knut Lian
Process Development Engineer
SensoNor asa
www.sensonor.com

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