[mems-talk] Adhesion promotors for TiN

[Bill Moffat]

Knut,
     The standard HMDS when applied in a vacuum vapor primer is an excellent adhesion promoter on TiN.  After the total dehydration caused by vacuum hot Nitrogen cycles the HMDS vapor is looking for Hydrogen.  The only hydrogen available is the hydroxyl ions on the surface of the TiN.  The fact that a metallic is involved will reduce the available number of hydroxyl ions so the actual time of prime may need to increased to compensate.  It can be checked easily using a goniometer to check surface tension.  Aim for more than 45 degrees contact angle.  Quick rule of thumb.  Where 5 minutes of prime are great for SiN, 20 minutes is best for Aluminum.  The Ti will be somewhere in between.  Let me know if we can help some more.  Bill Moffat 

-----Original Message-----
From: Knut Lian [mailto:knut.lian at sensonor.no]
Sent: Monday, June 30, 2003 11:08 PM
To: MEMS (E-mail)
Subject: [mems-talk] Adhesion promotors for TiN


Dear MEMS collegues,

Does anybody know a suitable adhesion promotor for improving the adhesion of Shipley 1800 series resist on TiN?

Best regards

Knut Lian
Process Development Engineer
SensoNor asa
www.sensonor.com



_______________________________________________
MEMS-talk at memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/