[mems-talk] Re: Removal of Mo oxidation

[Craig McGray]

Hi Andre,

One good way to do this would be to evaporate the oxide in a resistive 
heating process -- say, 75 A or so should do the trick.  ;-)

The catch, of course, is that this needs to be done in vacuum.

Good luck!

-Craig McGray
 Dartmouth College

>hi all:
>
>I'm using Mo electrodes in a resistive heating process - pushing up to 75 A of current through the electrodes.  The electrodes are charring - can anyone recommend a suitable cleaning/etching process to remove the oxide from Moly?
>