[mems-talk] Mumps structure length prevent stiction

[rakesh babu]

hi all,
 
      I am designing structures using Mumps process .
 
    what is the maximum length of cantilever and bridge type structures using both poly1 
and poly2 layers so that stiction does not occur.
 
 thank you so much for the help.
 
regards,
rakesh.
 
 


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