[mems-talk] SU-8 problem

[Thomas KF Lei]

Dear collegues,

I have some problems in doing MicroChem SU-8 2075 PR on Si. My process is:
spin 500rpm and 3000rpm 30secs
soft bake: 95C 15mins in oven
UV explore with filter WB-360: 300secs
PEB: 95C 10mins in oven
Develop: about 10mins

I found that the surface of SU-8 becomes wrinkling after PEB and my pattern peer off after develop. Can anyone give me some suggestions? Thank you very much.

Thomas