[mems-talk] platinum on SU-8

[Kirt & Erika Zipf-Williams]

> Good day everyone,
> I am a research student in U.K.
> Could anyone please tell me wome ways i can deposite platinum film on
SU-8?
> Any suggestions are welcomed.
> Thank you for your time.
> Chen-Han Lee

You can sputter or evaporate platinum.
Don't forget to use an adhesion layer.

    --Kirt Williams, Ph.D.   consultant