[mems-talk] RE: Cu Metal Etchant (Luciano Scaltrito)

[luciano scaltrito]

Ferric Chloride used to make printed circuit boards is a good etchant.
you have to use a buffer layer like Ta/Au or Ti/Au.


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                 ~ The truth is out there ~
Ing. Luciano Scaltrito
Dipartimento di Fisica
Politecnico di Torino
C.so Duca degli Abruzzi, 24
10129 Torino, Italy
tel +39 011 564.7305/564.4160
fax +39 011 564.7399
E-mail : luciano.scaltrito at polito.it
http://www.polito.it/centri/laborato/limadel/film/index.html
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