[mems-talk] Poly polishing slurry

Kumar Soma kumar_clk9 at yahoo.co.uk
Fri Jul 4 16:27:46 EDT 2003

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Dear all,

I am looking for different types of slurry that can be used to polish poly. Also any suggestion on type of pad and recipe are greatly appreciated. Any information of surface roughness related to it will be highly beneficial. Many thanks.

Kumar



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