[mems-talk] Protect backside of Si wafer from TMAH

Pimpin Alongkorn pimpin at thtlab.t.u-tokyo.ac.jp
Sun Jul 6 15:30:36 EDT 2003


Dear Folk,

I would like to purchase a wafer holder for wet etching that can protect a 
backside of wafer from etchant solution such as HF, TMAH and KOH. Could you 
recommend me a Japan company (or other countries are O.K.)? It will be 
invaluable help for me. Thank you very much.

Alongkorn Pimpin
THT laboratory



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