[mems-talk] backside protection for KOH/TMAH

[Pavel Neuzil]

Hi Alongkorn,
you might try products of SiMEMS Pte Ltd located in
Singapore. 
Pavel Neuzil
CTO
SiMEMS
neuzils at yahoo.com

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Dear Folk,

I would like to purchase a wafer holder for wet
etching that can 
protect a 
backside of wafer from etchant solution such as HF,
TMAH and KOH. Could 
you 
recommend me a Japan company (or other countries are
O.K.)? It will be 
invaluable help for me. Thank you very much.

Alongkorn Pimpin
THT laboratory


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