[mems-talk] Protect backside of Si wafer from TMAH

[Bill Flounders]

Take a look at:
http://www.ammt.de/html/wafer_holders.html

Bill Flounders, Ph.D.
Technology Manager
Berkeley Microlab


Pimpin Alongkorn wrote:
> Dear Folk,
> 
> I would like to purchase a wafer holder for wet etching that can protect 
> a backside of wafer from etchant solution such as HF, TMAH and KOH. 
> Could you recommend me a Japan company (or other countries are O.K.)? It 
> will be invaluable help for me. Thank you very much.
> 
> Alongkorn Pimpin
> THT laboratory
> 
> _______________________________________________
> MEMS-talk at memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/