[mems-talk] RE: MEMS material

[Jonathan Engel]

Kevin-

Nichrome (nickel chrome, 80/20) alloy fits most of your requirements.  It has 
high resistivity (~100 uOhm*cm), a modulus of ~200 Gpa, yield strength ~450 
Mpa, and a CTE of ~15e-6/C.  Deposition is usually performed via e-beam 
evaporation or sputtering which are relatively low temp (<600C).  There are 
likely other choices as well.  Good luck.

-Jonathan Engel
MASS Group, UIUC
http://mass.micro.uiuc.edu

>----- Forwarded Message -----
>From: General MEMS discussion <mems-talk at memsnet.org>
>To: MEMS Talk <mems-talk at memsnet.org>
>Subject: [mems-talk] MEMS Material !!
>
>Hello,
>I am looking for a  material for MEMS Actuators .
>I need a high eough resitivity material for Joul Heating purpose and a 
resonable yiled strenth ( > 500 Mpa) .
>It's Young's modules *Coefficient of Thermal Expansion must be great than 
polysilicon's. ( > 170Gpa*2.9e-6).
>Last of all, the dopositing temperature has to be lower than 600 degree and 
the thinnest layer need to be deposited would be 500nm.
>Are there any thin film materials like this???
>
>Thanks in Advance!!
>
>Regards,
>Kevin YU