[mems-talk] Protect backside of Si wafer from TMAH

[Roger Shile]

These aren't Japanese companies, but this sounds like what you're looking for:
 http://www.ammt.de.  
 http://www.silicet.de/Silicet_e.htm

Roger Shile

----- Original Message ----- 
From: "Pimpin Alongkorn" <pimpin at thtlab.t.u-tokyo.ac.jp>
To: <mems-talk at memsnet.org>
Sent: Saturday, July 05, 2003 10:30 PM
Subject: [mems-talk] Protect backside of Si wafer from TMAH


> Dear Folk,
> 
> I would like to purchase a wafer holder for wet etching that can protect a 
> backside of wafer from etchant solution such as HF, TMAH and KOH. Could you 
> recommend me a Japan company (or other countries are O.K.)? It will be 
> invaluable help for me. Thank you very much.
> 
> Alongkorn Pimpin
> THT laboratory
> 
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