[mems-talk] platinum on SU-8

[Chen-Han Lee]

Hi everyone,

thank you all especially Kirk and Bob,
you mention a adhesive layer for sputter platinum on silicon wafer
what material should i use? Will Ti or Cr do the job?
One more question, can i sputter gold on silicon wafer?

Derek
7/7/03

----- Original Message ----- 
From: "Kirt & Erika Zipf-Williams" <zipf-williams at mindspring.com>
To: "General MEMS discussion" <mems-talk at memsnet.org>
Sent: Thursday, July 03, 2003 7:25 PM
Subject: Re: [mems-talk] platinum on SU-8


> > Good day everyone,
> > I am a research student in U.K.
> > Could anyone please tell me wome ways i can deposite platinum film on
> SU-8?
> > Any suggestions are welcomed.
> > Thank you for your time.
> > Chen-Han Lee
> 
> You can sputter or evaporate platinum.
> Don't forget to use an adhesion layer.
> 
>     --Kirt Williams, Ph.D.   consultant
> 
> 
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