[mems-talk] %5Bmems-talk%5D PR strip after Mo etching&In-Reply-To=

[David Springer]

Hello Myung Kwon

I agree with a previous post that using xenon difluoride to etch your Mo would =
be an interesting alternative. Note it will etch at about 1/6th the rate of =
silicon so you would need to make sure there was no exposed silicon. Which =
raises the question, what is under your Mo? If it is silicon the XeF2 will =
continue to etch the Si after it is finished with the Mo. If it is just about =
anything other than Si it will stop.

If you think you would like to try this we would be willing to run a sample for =
you to see how it works. XACTIX is the world wide leader in etching equipment =
using xenon difluoride with several models to meet diverse budgets. You can =
contact me directly or you can contact  our local agent for support.

Best Regards
David Springer
XACTIX, Inc.
davids at xactix.com
www.xactix.com