[mems-talk] platinum on SU-8

[Kirt & Erika Zipf-Williams]

The most common adhesion layers are probably Cr, Ti, and 10Ti/90W.
Other transition metals have also been used as adhesion layers.
    --Kirt Williams, Ph.D.   consultant
----- Original Message ----- 
From: Chen-Han Lee <dcl815 at bham.ac.uk>
To: General MEMS discussion <mems-talk at memsnet.org>
Sent: Monday, July 07, 2003 11:28 AM
Subject: Re: [mems-talk] platinum on SU-8


> Hi everyone,
> 
> thank you all especially Kirk and Bob,
> you mention a adhesive layer for sputter platinum on silicon wafer
> what material should i use? Will Ti or Cr do the job?
> One more question, can i sputter gold on silicon wafer?
> 
> Derek
> 7/7/03
> 
> ----- Original Message ----- 
> From: "Kirt & Erika Zipf-Williams" <zipf-williams at mindspring.com>
> To: "General MEMS discussion" <mems-talk at memsnet.org>
> Sent: Thursday, July 03, 2003 7:25 PM
> Subject: Re: [mems-talk] platinum on SU-8
> 
> 
> > > Good day everyone,
> > > I am a research student in U.K.
> > > Could anyone please tell me wome ways i can deposite platinum film on
> > SU-8?
> > > Any suggestions are welcomed.
> > > Thank you for your time.
> > > Chen-Han Lee
> > 
> > You can sputter or evaporate platinum.
> > Don't forget to use an adhesion layer.
> > 
> >     --Kirt Williams, Ph.D.   consultant
> > 
> > 
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> 
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