[mems-talk] W anisotropic etch and etch mask

[transene]

Transene Company manufactures Tungsten Etchant TFW for W etching
applications.  Please contact me for more information or visit our
website, www.transene.com.

Christopher Christuk
Transene Company, Inc.
10 Electronics Avenue
Danvers MA  01923
Tel:  978 777 7860
Fax:  978 739 5640
Email:  Christopher at transene.com

-----Original Message-----
From: cshen at briontech.com [mailto:cshen at briontech.com] 
Sent: Monday, July 07, 2003 1:32 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] W anisotropic etch and etch mask


I'm looking for a W anisotropic etch machine and recipe. Does anyone
know
of any company or institute that can do this? The feature is about 100nm
diameter apertures, W film is about 120nm thick.
Any help will be greatly appreciated.
Chongfei