[mems-talk] drilling holes on glass by electrochemical method

[Shay Kaplan]

Hello Enzhu,
We have tried it once. You imerse the glass in conc. NAOH solution, take a
sharp pin, apply ~30V to it and have the other electrode inthe solution. the
current are pretty high so you need a good supply. You apply small force at the
needle and the tip slowly makes it way in.
We were trying to make it work with an array of pins to make multiple holes at
once but with very limitted succeses. The pins erode (even when the tips are
gols coated) and the glass sometimes cracks.
Try ultrasonic drilling.
Good luck
Shay

Andrew Liang wrote:

> Dear all,
>
> Is there anyone happen to know the electrochemical method to drill holes on
> glass substrate? Thank you.
>
> Best Regards.
> Enzhu Liang
>
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