[mems-talk] Protection of backside of chips in TMAH

[kris]

Dear all,

I am trying to etch si in TMAH solution.I have very
small chips(not wafer) to be etched.As we need to have
mild stirring for the etchant solution,i was wondering
how to place my chips in the etchant solution.

Is there anyway that i can etch small chips in TMAH
solution.I want to know if there is any vendor who can
supply me epoxy so that i can attach my chips to any
glass substrate and cure them which also protects the
backside of the chips.I need epoxy that should not
change PH of the solution as the etch process is
highly sensitive to the change in PH values.

Your suggestions would be highly grateful.

Thanks
Kris

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