[mems-talk] Spin a very thin layer of PR

Lung-hao Hu lung.hu at colorado.edu
Fri Dec 30 16:02:12 EST 2005


If I spin a very thin layer PR, will I observe lots of micro-dots on the
substrate due to the surface tension??
I just tried to use Polyimide mixing with thinner 1:4 and spin at 4000rpm for
40s on a glass slide.
But it seems not what I want.

Is there anyone who did this experiment before??

Lung-hao Hu

Graduate Student


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