[mems-talk] Carbon Sputtered Films

Sreemanth M Uppuluri sreemanth at hotmail.com
Tue Aug 1 08:50:24 EDT 2006


Hello All,

I have sputtered carbon films on my substrates and now I am trying to remove 
them. I tried solvent clean but it doesn't seem to work very well. Do you 
have suggestions?

Thanks,
Sreemanth




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