[mems-talk] Carbon Sputtered Films

[Gary]

Sreemanth, My guess is that the carbon film you sputtered is amorphous and 
adherent.  If the substrate will withstand a strong oxidation, plasma or 
chemical (something like piranha) you could try that. Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:	Sreemanth M Uppuluri [SMTP:sreemanth at hotmail.com]
Sent:	Tuesday, August 01, 2006 8:50 AM
To:	mems-talk at memsnet.org
Subject:	[mems-talk] Carbon Sputtered Films

Hello All,

I have sputtered carbon films on my substrates and now I am trying to 
remove
them. I tried solvent clean but it doesn't seem to work very well. Do you
have suggestions?