[mems-talk] anisotropic etching of glass

[Joe Grogan]

Hi all,

I was wondering if anyone has experience with anisotropic RIE of glass. 
I would like to form straight walled channels in microscope slides 
(sodalime) or coverslips (zinc titania). I found some papers on the 
topic but didn't have much success with their suggestions so I was 
hoping to find someone with personal experience.

thanks in advance for any responses.

-Joe Grogan