[mems-talk] anisotropic etching of glass

[Brent Garber]

Joe,

Have you tried SF6, 75 watts, with a chamber pressure less than 10 mT?
Every RIE acts differently.

Brent

Joe Grogan wrote:

> Hi all,
>
> I was wondering if anyone has experience with anisotropic RIE of glass.
> I would like to form straight walled channels in microscope slides
> (sodalime) or coverslips (zinc titania). I found some papers on the
> topic but didn't have much success with their suggestions so I was
> hoping to find someone with personal experience.