[mems-talk] Pt on Si

[Jeehwan Kim]

Hi Oliver,

I deposite 200nm Pt on Si with 50A Ti adhesion layer via e-beam evaporator
and then put that into HF solution. Pt was removed (peeled off) after
several minute. Is that difference coming from machine we used?

Thanks

Jeehwan

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Oliver Horn
Sent: Thursday, August 03, 2006 12:30 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Pt on Si

Hi Kim,

I did variations from 125 to 250 nm Pt, directly sputtered on fresh 
HF-dipped Si. It survived a lithography step and wet chemical etching. 
But don't use an ultrasonic bath!