[mems-talk] Pt on Si

[Oliver Horn]

Hi Jeehwan,

Ti is etched in HF, maybe your adhesion layer just vanished. Could you 
use Cr instead of Ti?

 I used sputtered Pt which should adhere better than evaporated Pt. But 
I never tried to put it into HF.

regards,

Oliver

>Hi Oliver,
>
>I deposite 200nm Pt on Si with 50A Ti adhesion layer via e-beam evaporator
>and then put that into HF solution. Pt was removed (peeled off) after
>several minute. Is that difference coming from machine we used?