[mems-talk] Indium evaporation

[agarwal at eng.usf.edu]

Hello,
I am trying to e-beam evaporate .35 microns indium on silicon with Ti/Au
on it. I am getting milky looking film instead of a shiny, aluminum like
film.
I am using indium shots 99.9999% using a moly liner in a AJA system.
This oxide prohibits me to bond this In coated wafer to another Au coated
wafer.
Has anyone else encoutered the same issue with indium evap. How to get rid
of the oxide.
Any suggestion will be appreciated.

thanks