[mems-talk] Re: In evaporation

[huy vo]

Agarwal:  Shiny like Al film? Evaporated Al film can also be very milky too if you don't do it right. Just becacause the film appears milky doesn't mean it got oxidized. There a a lot of reason to why the film is milky, the popular reason is the grain size of the film. You can eliminate some of the theories/uncertainties by slow down the evap rate and evap a thinner layer, say 1000A ......
   

  Message: 5
Date: Fri, 4 Aug 2006 09:57:54 -0400 (EDT)
From: agarwal at eng.usf.edu
Subject: [mems-talk] Indium evaporation
To: mems-talk at memsnet.org
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<42155.70.127.39.77.1154699874.squirrel at mailbox3.acomp.usf.edu>
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Hello,
I am trying to e-beam evaporate .35 microns indium on silicon with Ti/Au
on it. I am getting milky looking film instead of a shiny, aluminum like
film.
I am using indium shots 99.9999% using a moly liner in a AJA system.
This oxide prohibits me to bond this In coated wafer to another Au coated
wafer.
Has anyone else encoutered the same issue with indium evap. How to get rid
of the oxide.