[mems-talk] Thermal evaporation of Al

[Marc van den Boogaart]

MEMS experts,

I am trying to set-up a thermal evaporation process of Al. I have small
crucibles of AlO and a tungsten heating element (shielded).

However, as soon as the Al melts the high wetting of Al results in Al
leaving the crucible (wetting the outside of the crucible).

The result is that the Al attacks the heating element and renders it
unusable for other crucibles.  

The idea is not to replace the heating element after a couple of Al
evaporations. :-)

Any help, suggestions or tips and tricks are greatly appreasiated.


Regards,
Marc


Marc A. F. van den Boogaart
PhD / Ing. precision eng.
Microsystem Laboratory (LMIS1)
EPFL - STI - IMM - LMIS1,