[mems-talk] clean the chips after DRIE

Fri Aug 11 02:49:04 EDT 2006

maybe  you can try KOH.

chengzhengxi
2006-08-11

&#183;&#162;&#188;&#254;&#200;&#203;&#163;&#186; D. Zhou
&#183;&#162;&#203;&#205;&#202;&#177;&#188;&#228;&#163;&#186; 2006-08-10 19:04:40
&#202;&#213;&#188;&#254;&#200;&#203;&#163;&#186; MEMS_BBS
&#179;&#173;&#203;&#205;&#163;&#186; 
&#214;&#247;&#204;&#226;&#163;&#186; [mems-talk] clean the chips after DRIE

Dear all,

I used S1813 as the mask for the DRIE of the top layer from the front-side. 
Then I put the chip upside down, attached it to an Oxide wafer and did 
another DRIE of the substrate from the back-side . After the etch, I found 
it difficult to remove the polymer formed during the etch. I dip my chips 
in Aceton for 10 mins and then used Oxygen plasmer to clean it. However, 
the top layer(device layer) of my chips were still not clean enough. Could 
anybody give me some suggestions on how to completely clean the chips after 
these two DRIE process? Thanks very much.