[mems-talk] Developing S8 channels through reservoir ports

[prabhu arumugam]

Dear SU 8 experts,

I am trying to develop a 20 micron high SU8 channel
(1.2 cm long) bonded between glass and silicon through
the fluidic ports at either end of the channel. I am
not able to develop the channel fully. I exposed for
20 s and developed in an ultrasonic bath.  Could
anyone share their experience/tricks/tips in solving
this.

Thanks for all the help.

Prabhu