[mems-talk] how to dice the silicon wafer?

Tue Aug 15 07:19:55 EDT 2006

laser dicer

chengzhengxi
2006-08-15

&#183;&#162;&#188;&#254;&#200;&#203;&#163;&#186; Song Wuzhou
&#183;&#162;&#203;&#205;&#202;&#177;&#188;&#228;&#163;&#186; 2006-08-12 12:31:14
&#202;&#213;&#188;&#254;&#200;&#203;&#163;&#186; mems-talk at memsnet.org
&#179;&#173;&#203;&#205;&#163;&#186; 
&#214;&#247;&#204;&#226;&#163;&#186; [mems-talk] how to dice the silicon wafer?

Dear. all
   I have some trouble with dicing the silicon wafer after release. The
release is done using back hole open. Could you give me some suggestion?
Thanks!

Regards
Wuzhou