[mems-talk] Developing S8 channels through reservoir ports

[Joseph Grogan]

At what point in the SU8 processing are you bonding the whole thing 
together and how are you doing the bonding?

-Joe Grogan

prabhu arumugam wrote:
> Dear SU 8 experts,
> 
> I am trying to develop a 20 micron high SU8 channel
> (1.2 cm long) bonded between glass and silicon through
> the fluidic ports at either end of the channel. I am
> not able to develop the channel fully. I exposed for
> 20 s and developed in an ultrasonic bath.  Could
> anyone share their experience/tricks/tips in solving
> this.
>